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  • Novelion Systems Co., Ltd. – Advanced plasma technology for next microfabrications!

Custom making for various plasma application equipments

 We custom-make plasma application equipment and ion beam equipment with reasonable budget. We will …

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ECR line beam ion source (ELBS-150)

  ELBS-150 is an unique line beam ion source applied ECR discharge for reactive ion beam milling sys …

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High power ECR plasma source (EPS-120)

  EPS-120 is an extremely dense plasma producing unit applied ECR discharge for MEMS processing syst …

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Compact ECR atomic/radical beam source (ERS-35)

  ERS-35 is an ECR atomic/radical source applicable to ultra high vacuum systems. [Merit]   – …

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Ampere class ion source for milling equipment

 It is a large ion source that can be applied to high-speed milling with large area ion beam. We wil …

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