High Current DC Discharge Line Beam Ion Source（LBS-120HC）
- 2023-11-29
- novelion
High-current DC discharge type fully automatic line beam ion source that can be applied to high-spee …
Custom making for various plasma application equipments
- 2017-02-15
- novelion
We custom-make plasma application equipment and ion beam equipment with reasonable budget. We will …
ECR line beam ion source (ELBS-150)
- 2016-11-12
- novelion
ELBS-150 is an unique line beam ion source applied ECR discharge for reactive ion beam milling sys …
High power ECR plasma source (EPS-120)
- 2016-11-12
- novelion
EPS-120 is an extremely dense plasma producing unit applied ECR discharge for MEMS processing syst …
Compact ECR atomic/radical beam source (ERS-35)
- 2016-11-12
- novelion
ERS-35 is an ECR atomic/radical source applicable to ultra high vacuum systems. [Merit] – …
Ampere class ion source for milling equipment
- 2016-11-11
- novelion
It is a large ion source that can be applied to high-speed milling with large area ion beam. We wil …
Sharing
Recruitment
ポスドク･大学院生インターン随時募集中！！
