High-current DC discharge type fully automatic line beam ion source that can be applied to high-spee …
We custom-make plasma application equipment and ion beam equipment with reasonable budget. We will …
ELBS-150 is an unique line beam ion source applied ECR discharge for reactive ion beam milling sys …
EPS-120 is an extremely dense plasma producing unit applied ECR discharge for MEMS processing syst …
ERS-35 is an ECR atomic/radical source applicable to ultra high vacuum systems. [Merit] – …
It is a large ion source that can be applied to high-speed milling with large area ion beam. We wil …