ECR line beam ion source (ELBS-150)

  ELBS-150 is an unique line beam ion source applied ECR discharge for reactive ion beam milling systems.

[Merit]
  – Production of widely uniform ion beams by its unique magnetic design.
  – High power microwabe feeding by 7/16-type new adopted coaxial feed through.
  – Metal contamination free by dielectric wall.
  – New long life beam electrodes.

[Detail]
  – Beam size : 150mm in width
  – Beam energy : 100-2,000 eV
  – Maximum beam current : 10 mA/cm2
  – Microwave connection : DIN 7/16-type
  – Microwave frequency : 2.45 GHz
  – Maximum Power : 500 W
  – Cooling : water.

[Applications]
  – MEMS high speed milling formations.
  – Magnetic head milling processes.
  – High frequency circuit tunnings.