We custom-make plasma application equipment and ion beam equipment with reasonable budget. We will carefully support you until the development goal is reached.
[Example of development]
– Sputtering film forming equipment for compound thin film.
– Ion beam etching equipment.
– Various plasma CVD / etching equipment.
– PVD coating equipment and high speed evaporation source.
– Hole inside surface coating equipment.
– Neutral Radical Processing equipment.
– Concentrated high flux ion beam processing equipment.
– Ultra low energy large current ion beam irradiation equipment.
– General purpose vacuum test stand, and others.