• Advanced plasma technology for next microfabrications!

High Current DC Discharge Line Beam Ion Source(LBS-120HC)

High-current DC discharge type fully automatic line beam ion source that can be applied to high-spee …

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We will exhibit at SEMICON Japan 2023!

 [Exhibition information]   Dates: December 13th, 2016 (Wed.) to 15th (Fri.)                10: 00-1 …

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About relocating the factory.

From November 1, 2018, Novelion Systems moved the business office to the following address. Shipping …

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We are seeking key staffs!

  We are seeking key staffs who sympathize with our vision and work hard together for business expan …

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Custom making for various plasma application equipments

 We custom-make plasma application equipment and ion beam equipment with reasonable budget. We will …

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We exhibited at SEMICON Japan 2016!

This event ended. Thank you for coming.  Novellion Systems exhibited at SEMICON Japan 2016.   [Exhib …

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Please visit our new homepage!

Using WordPress, I created a blog-like website newly. For reference books, “WordPress Super In …

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ECR line beam ion source (ELBS-150)

  ELBS-150 is an unique line beam ion source applied ECR discharge for reactive ion beam milling sys …

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High power ECR plasma source (EPS-120)

  EPS-120 is an extremely dense plasma producing unit applied ECR discharge for MEMS processing syst …

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