ERS-35 is an ECR atomic/radical source applicable to ultra high vacuum systems.
[Merit]
– All metal seal for ultra high vacuum systems.
– Easy coaxial cable connection for microwave.
– Radical beam productions by dielectric extraction grid.
[Detail]
– Vacuum port size : ICF-70
– Microwave connection : Type N
– MIcrowave frequency : 2.45 GHz
– Maximum power : 100 W
– Cooling : water
[Application]
– Oxigen / nitrogen radical beam sources for MBE systems.
– Atomic hytrogen beam sources for surface cleanings.