• Advanced plasma technology for next microfabrications!


  ERS-35 is an ECR atomic/radical source applicable to ultra high vacuum systems.

  – All metal seal for ultra high vacuum systems.
  – Easy coaxial cable connection for microwave.
  – Radical beam productions by dielectric extraction grid.

  – Vacuum port size : ICF-70
  – Microwave connection : Type N
  – MIcrowave frequency : 2.45 GHz
  – Maximum power : 100 W
  – Cooling : water 

  – Oxigen / nitrogen radical beam sources for MBE systems.
  – Atomic hytrogen beam sources for surface cleanings.

Picture of plasma generation and radical flux.