• TEL: +81-774-66-6387
  • Novelion Systems Co., Ltd. – Advanced plasma technology for next microfabrications!

imgp0405

  ERS-35 is an ECR atomic/radical source applicable to ultra high vacuum systems.

[Merit]
  – All metal seal for ultra high vacuum systems.
  – Easy coaxial cable connection for microwave.
  – Radical beam productions by dielectric extraction grid.

[Detail]
  – Vacuum port size : ICF-70
  – Microwave connection : Type N
  – MIcrowave frequency : 2.45 GHz
  – Maximum power : 100 W
  – Cooling : water 

[Application]
  – Oxigen / nitrogen radical beam sources for MBE systems.
  – Atomic hytrogen beam sources for surface cleanings.

DSC_0273
Picture of plasma generation and radical flux.