Compact ECR atomic/radical beam source (ERS-35)
- 2016-11-12
- novelion
ERS-35 is an ECR atomic/radical source applicable to ultra high vacuum systems. [Merit] – …
Ampere class ion source for milling equipment
- 2016-11-11
- novelion
It is a large ion source that can be applied to high-speed milling with large area ion beam. We wil …
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