• Advanced plasma technology for next microfabrications!

What`s New

Compact ECR atomic/radical beam source (ERS-35)

  ERS-35 is an ECR atomic/radical source applicable to ultra high vacuum systems. [Merit]   – …

2016-11-12 /
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Ampere class ion source for milling equipment

 It is a large ion source that can be applied to high-speed milling with large area ion beam. We wil …

2016-11-11 /
Products
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