What`s New
About relocating the factory.
From November 1, 2018, Novelion Systems moved the business office to the following address. Shippin …
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We are seeking key staffs!
We are seeking key staffs who sympathize with our vision and work hard together for business expan …
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Custom making for various plasma application equipments
We custom-make plasma application equipment and ion beam equipment with reasonable budget. We will …
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We exhibited at SEMICON Japan 2016!
This event ended. Thank you for coming. Novellion Systems exhibited at SEMICON Japan 2016. [Exhib …
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Please visit our new homepage!
Using WordPress, I created a blog-like website newly. For reference books, “WordPress Super In …
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ECR line beam ion source (ELBS-150)
ELBS-150 is an unique line beam ion source applied ECR discharge for reactive ion beam milling sys …
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High power ECR plasma source (EPS-120)
EPS-120 is an extremely dense plasma producing unit applied ECR discharge for MEMS processing syst …
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Compact ECR atomic/radical beam source (ERS-35)
ERS-35 is an ECR atomic/radical source applicable to ultra high vacuum systems. [Merit] – …
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Ampere class ion source for milling equipment
It is a large ion source that can be applied to high-speed milling with large area ion beam. We wil …
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