{"id":718,"date":"2023-11-29T17:41:00","date_gmt":"2023-11-29T08:41:00","guid":{"rendered":"https:\/\/www.novelion-sys.com\/?p=718"},"modified":"2023-11-29T17:56:25","modified_gmt":"2023-11-29T08:56:25","slug":"%e5%a4%a7%e9%9b%bb%e6%b5%81dc%e6%94%be%e9%9b%bb%e5%9e%8b%e3%83%a9%e3%82%a4%e3%83%b3%e3%83%93%e3%83%bc%e3%83%a0%e3%82%a4%e3%82%aa%e3%83%b3%e6%ba%90%ef%bc%88lbs-120hc%ef%bc%89","status":"publish","type":"post","link":"https:\/\/www.novelion-sys.com\/en\/2023\/11\/29\/%e5%a4%a7%e9%9b%bb%e6%b5%81dc%e6%94%be%e9%9b%bb%e5%9e%8b%e3%83%a9%e3%82%a4%e3%83%b3%e3%83%93%e3%83%bc%e3%83%a0%e3%82%a4%e3%82%aa%e3%83%b3%e6%ba%90%ef%bc%88lbs-120hc%ef%bc%89\/","title":{"rendered":"High Current DC Discharge Line Beam Ion Source\uff08LBS-120HC\uff09"},"content":{"rendered":"\n\n\n

High-current DC discharge type fully automatic line beam ion source that can be applied to high-speed ion beam milling equipment<\/p>\n

\u3010Features\u3011
\u30fbHigh current density ion beam using hot cathode
\u30fbExcellent beam distribution uniformity due to optimized magnetic field design
\u30fbFast beam adjustment with fully automated power control system<\/p>\n


\u3010Equipment specifications\u3011
\u30fbBeam size\uff1a120mm\u00d710mm(Compatible with large substrates)
\u30fbBeam energy\uff1a100\uff5e2,000 eV
\u30fbBeam current density\uff1aMAX 10mA\/\u33a0
\u30fbIonized gas\uff1aHydrogen, nitrogen, rare gases, etc.
\u30fbCooling method\uff1awater cooling<\/p>\n


\u3010Application example\u3011
\u30fbHigh-speed milling of MEMS structures
\u30fbFine milling of magnetic memory
\u30fbResonance frequency adjustment of high frequency elements<\/p>\n","protected":false},"excerpt":{"rendered":"

High-current DC discharge type fully automatic line beam ion source that can be applied to high-spee …<\/p>\n","protected":false},"author":1,"featured_media":721,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_locale":"en_US","_original_post":"https:\/\/www.novelion-sys.com\/?p=714","_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[3],"tags":[],"class_list":["post-718","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-products","en-US"],"yoast_head":"\nHigh Current DC Discharge Line Beam Ion Source\uff08LBS-120HC\uff09 - Novelion Systems Co., Ltd.<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" 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