{"id":169,"date":"2016-11-12T14:10:23","date_gmt":"2016-11-12T05:10:23","guid":{"rendered":"http:\/\/www.novelion-sys.com\/?p=169"},"modified":"2016-12-02T10:03:35","modified_gmt":"2016-12-02T01:03:35","slug":"ers_35","status":"publish","type":"post","link":"https:\/\/www.novelion-sys.com\/en\/2016\/11\/12\/ers_35\/","title":{"rendered":"Compact ECR atomic\/radical beam source (ERS-35)"},"content":{"rendered":"

\"imgp0405\"<\/a><\/p>\n

\u00a0 ERS-35 is an ECR atomic\/radical source applicable to ultra high vacuum systems.<\/p>\n

[Merit]
\n \u00a0 – All metal seal for ultra high vacuum systems.
\n \u00a0 – Easy coaxial cable connection for microwave.
\n \u00a0 – Radical beam productions by dielectric extraction grid.<\/p>\n

[Detail]
\n \u00a0 – Vacuum port size : ICF-70
\n \u00a0 – Microwave connection : Type N
\n \u00a0 – MIcrowave frequency : 2.45 GHz
\n \u00a0 – Maximum power : 100 W
\n \u00a0 – Cooling : water\u00a0<\/p>\n

[Application]
\n \u00a0 – Oxigen \/ nitrogen radical beam sources for MBE systems.
\n \u00a0 – Atomic hytrogen beam sources for surface cleanings.<\/p>\n

\"DSC_0273\"<\/a>
Picture of plasma generation and radical flux.<\/figcaption><\/figure>\n","protected":false},"excerpt":{"rendered":"

\u00a0 ERS-35 is an ECR atomic\/radical source applicable to ultra high vacuum systems. 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