{"id":166,"date":"2016-11-12T14:15:37","date_gmt":"2016-11-12T05:15:37","guid":{"rendered":"http:\/\/www.novelion-sys.com\/?p=166"},"modified":"2016-12-02T10:02:48","modified_gmt":"2016-12-02T01:02:48","slug":"eps_120","status":"publish","type":"post","link":"https:\/\/www.novelion-sys.com\/en\/2016\/11\/12\/eps_120\/","title":{"rendered":"High power ECR plasma source (EPS-120)"},"content":{"rendered":"

\"p01\"<\/a><\/p>\n

\u00a0 EPS-120 is an extremely dense plasma producing unit applied ECR discharge for MEMS processing systems.<\/p>\n

[Merit]
\n \u00a0 – Extra large volume ECR region by original magnet structure.
\n \u00a0 – Capability of high power operations by excellent cooling systems.
\n \u00a0 – Metal contamination free.
\n \u00a0 – Compact module concept for the plural applying.<\/p>\n

[Detail]
\n \u00a0 – Vacuum port size : 120 mm dia.
\n \u00a0 – Wave guide size : WR340
\n \u00a0 – Microwave frequency : 2.45 GHz
\n \u00a0 – Maximum Power : 2000 W
\n \u00a0 – Cooling : water<\/p>\n

[Applications]
\n \u00a0 – Etching or ashing systems.\u00a0
\n \u00a0 – Reactive ion beam etching systems.
\n \u00a0 – Ion nitriding or oxidizing systems.
\n \u00a0 – DLC coating systems.\u00a0\u00a0 \u00a0<\/p>\n

\"cimg2238\"<\/a><\/p>\n

\"ecr140717_prb2\"<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"

\u00a0 EPS-120 is an extremely dense plasma producing unit applied ECR discharge for MEMS processing syst …<\/p>\n","protected":false},"author":1,"featured_media":79,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_locale":"en_US","_original_post":"78","_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[3],"tags":[],"class_list":["post-166","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-products","en-US"],"yoast_head":"\nHigh power ECR plasma source (EPS-120) - Novelion Systems Co., Ltd.<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.novelion-sys.com\/en\/2016\/11\/12\/eps_120\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"High power ECR plasma source (EPS-120) - 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